JPS6426843U - - Google Patents
Info
- Publication number
- JPS6426843U JPS6426843U JP12212387U JP12212387U JPS6426843U JP S6426843 U JPS6426843 U JP S6426843U JP 12212387 U JP12212387 U JP 12212387U JP 12212387 U JP12212387 U JP 12212387U JP S6426843 U JPS6426843 U JP S6426843U
- Authority
- JP
- Japan
- Prior art keywords
- support rods
- wafer
- wafer carrier
- resin material
- presser plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12212387U JPS6426843U (en]) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12212387U JPS6426843U (en]) | 1987-08-11 | 1987-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426843U true JPS6426843U (en]) | 1989-02-15 |
Family
ID=31369754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12212387U Pending JPS6426843U (en]) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426843U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000091413A (ja) * | 1998-09-16 | 2000-03-31 | Nec Kagoshima Ltd | カセット及び基板乾燥方法 |
| KR20020008949A (ko) * | 2000-07-21 | 2002-02-01 | 김광교 | 반도체 제조에 사용되는 웨이퍼 보우트 |
-
1987
- 1987-08-11 JP JP12212387U patent/JPS6426843U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000091413A (ja) * | 1998-09-16 | 2000-03-31 | Nec Kagoshima Ltd | カセット及び基板乾燥方法 |
| KR20020008949A (ko) * | 2000-07-21 | 2002-02-01 | 김광교 | 반도체 제조에 사용되는 웨이퍼 보우트 |
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